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MEMSnet Home: MEMS-Talk: Coventorware Lift-Off Modeling
Coventorware Lift-Off Modeling
2009-06-16
Yasin Damgaci
Coventorware Lift-Off Modeling
Yasin Damgaci
2009-06-16
Hi All,

I am trying to model lift-off in Coventorware. In the tutorials they say
metal thickness should be negative and smaller than photoresist thickness to
achive the final metal thickness. I tried to give negative value but the
program doesn't accepted.

Is there anyone has such an experience to model lift-off in Coventorware
process editor ?

Thanks

Yasin
reply
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