never tried this. but you may wanna try to use a thin layer of uncrosslinked
SU-8 as adhension layer. that might help

Guocheng Shao

--- On Tue, 6/23/09, 김태진  wrote:


From: 김태진 
Subject: [mems-talk] bonding su-8 layer with pdms?
To: [email protected]
Date: Tuesday, June 23, 2009, 12:58 AM


Hi all!

Has anyone tried bonding a Su-8 layered substrate with PDMS?

I made a attempts by treating a su-8 film coated wafer with pdms using oxygen
plasma (30W for 1 min), but the devices seemed not bond at all.

Does anyone have suggestions?

Thanks!
Best regards,

TJ