Hi all,

I want to know if it is possible to fill a small deep trench with W by means of
PECVD.
Dimensions:

   Width is app. 0.5 µm
   Depth is app. 5µm

Or what is the more standard ratio for filling such trenches by PECVD?

Thanks in advance.

Peter Kuijpers
MiPlaza Technology Laboratories
Philips Research Europe
Email: [email protected]