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MEMSnet Home: MEMS-Talk: wafer bonding warpage
wafer bonding warpage
2009-06-27
杜 彦召
2009-06-28
Yoshi.Sakata_Gmail
2009-06-28
Bill Moffat
2009-06-30
Brubaker Chad
wafer bonding warpage
杜 彦召
2009-06-27
Hi all:
i am bonding one glass wafer and one silicon wafer with epoxy and their TEC is
the same. But why does it have near 500um warpage after bonding?

Thank you!

Andrew Du
reply
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