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MEMSnet Home: MEMS-Talk: methods to hold thin glass wafers
methods to hold thin glass wafers
2009-07-07
li shifeng
2009-07-07
Shay Kaplan
2009-07-07
Bill Moffat
2009-07-09
Rejoy Surendran
methods to hold thin glass wafers
li shifeng
2009-07-07
Hi, I am working on 4" or 3" thin glass wafers. Because it is thin, glass wafer
is very easy to break during processes. I am looking for any tools or methods to
hold these thin glass wafers.

Thanks!

shifeng
reply
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