A common way to solve this problem is to glue the this glass wafers to
robust silicon wafers for processing.  Then unglue after the processing
finishes.  Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of li shifeng
Sent: Tuesday, July 07, 2009 6:06 AM
To: [email protected]
Subject: [mems-talk] methods to hold thin glass wafers

Hi, I am working on 4" or 3" thin glass wafers. Because it is thin,
glass wafer is very easy to break during processes. I am looking for any
tools or methods to hold these thin glass wafers.

Thanks!

shifeng