Hi,

You can try photosensitive permanent polyimides:
HD8820 (HDMicrosystem) or AP2210 (Fujifilm)

They are quite similar products (gamma-butyrolactone formulation) that can be
exposed both in broad-band or i-line and are developable after exposure in
TMAH solutions.

Regards
Noemi

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of dai truong
Sent: Wednesday, July 08, 2009 11:10 AM
To: General MEMS discussion
Subject: [mems-talk] Polyimide information

Hi all,

I want to use polyimide as an dielectric layer in III-V devices. So I am
going to find out which polyimide photoresist is good.

But I only can get information about SU-8, and cannot find out any others
(e.g. probimide,...).
are there anyone know where there are information about polyimide?

Thank you very much!