Try the following link Symposium on Polymers for Microelectronics. This
is a technical symposium every 2 years given by Hitachi/Dupont on
Polyimides. Bill Moffat
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of dai truong
Sent: Wednesday, July 08, 2009 2:10 AM
To: General MEMS discussion
Subject: [mems-talk] Polyimide information
Hi all,
I want to use polyimide as an dielectric layer in III-V devices. So I am
going to find out which polyimide photoresist is good.
But I only can get information about SU-8, and cannot find out any
others (e.g. probimide,...).
are there anyone know where there are information about polyimide?
Thank you very much!