Hi everyone,

During the processing of glass wafers with a layer of aluminum, I saw the
presence of dust and other contaminants on the wafer. Up to now, I don't do any
kind of cleaning after I sputtered the aluminum on the glass wafer because I'm
afraid this will affect the aluminum layer.

Can you recommend me a cleaning method which removes the contaminations without
harming the aluminum layer? Or are there other tricks to avoid contamination?

Regards,
Nicolas

Katholieke Universiteit Leuven
Faculty of Bioscience Engineering
Department Biosystems (BIOSYST)
Division Mechatronics, Biostatistics, and Sensors (MeBioS)
Willem De Croylaan 42, box 2428
B-3001 LEUVEN

Tel: +32 16 32 06 93
Fax: +32 16 32 29 55
E-mail:
[email protected]
Web: www.biosensors.be