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MEMSnet Home: MEMS-Talk: Frequency for changing Oil in Oil Diffusion Pumps
Frequency for changing Oil in Oil Diffusion Pumps
2009-07-10
Nataraj
2009-07-10
shay kaplan
2009-07-11
Edward Sebesta
2009-07-11
Purvi Kikani
Frequency for changing Oil in Oil Diffusion Pumps
Nataraj
2009-07-10
Dear All,

              Can any one advise me, what is the frequency for changing the Oil
in Oil diffusion pumps?  Is it time based or does it depend on the utilization
of
the machines.

Regards,

Nataraj Santhanam
Sputtering Section

reply
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