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MEMSnet Home: MEMS-Talk: Storage of developed AZ photoresist
Storage of developed AZ photoresist
2009-07-10
Y.Tian
2009-07-13
Krueger, Bernd
2009-07-13
Y.Tian
2009-07-13
Krueger, Bernd
2009-07-13
Y.Tian
2009-07-15
Krueger, Bernd
Storage of developed AZ photoresist
Y.Tian
2009-07-10
Hi All,

Does anybody have the experience about storage of the wafers with developed AZ
photoresist patterns? I just got loads of samples patterned with AZ, but I can
not use them immediately. I just have general idea that I should keep them away
from UV and keep them dry. Anything specific I should keep in mind?

Thank you all.

Yingtao
reply
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