Hello.
My question which chemical etches the PMMA.
I use PMMA as resist, And I want to remove PMMA some.
So to say, I have 100 nm thickness PMMA layer, and I want to
etch the PMMA about 30 nm thickness.
I know that the Oxygen RIE can this, but I want to know
the wet etching method not dry etching method.
I think some chemicals could do it.
I want to know which chemicals does that.
sincerely yours.
I wait your answer, thank you..
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