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Dear MEMS researchers,
I'm now using EPON SU-8, but I have a problem to make a good adhesion
between the Si wafer (1 micron SiO2 layer on) and the SU-8.
Please does anyone tell me processing guide lines about?
Thank you very much,
Antonella
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Antonella Benvenuto
Electronic Eng.
Mitech Lab-Scuola Superiore Sant'Anna
Via Carducci 40
56127 Pisa- Italy
Tel +39 050 883403
Fax +39 050 883402
e-mail: [email protected]
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Content-Transfer-Encoding: 7bit
Dear MEMS researchers,
I'm now using EPON SU-8, but I have a problem to make a good adhesion
between the Si wafer (1 micron SiO2 layer on) and the SU-8.
Please does anyone tell me processing guide lines about?
Thank you very much,
Antonella
