You could try piranha then HF

Dr Michael Cooke
Electronic Device Process Scientist

PETEC (The Plastic Electronics Technology Centre)
part of the CPI Group (Centre for Process Innovation)

NETPark,
Thomas Wright Way,
Sedgefield,
County Durham TS21 3FG

T:  +44 (0) 1740 625 717 (office)/+44 (0)1642 442 480 (lab)
F: +44 (0)1642 447 298

www.ukpetec.com
www.uk-cpi.com


-----Original Message-----
From: Shah, Forum N [mailto:forum@exchange.uta.edu]
Sent: 21 July 2009 22:11
To: mems-talk@memsnet.org
Subject: [mems-talk] How to clean silicon wafer after a bad lift-off

Hello All,

Can anyone tell me how to clean the Silicon wafers after doing lift-off
process (bad lift-off)? So that I can re-use the wafer. I know we use HF
for cleaning the wafers but I am not sure of the exact protocol. Any
suggestions would be appreciated.

Thanks
Forum