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MEMSnet Home: MEMS-Talk: s1813 question
s1813 question
2009-08-01
Andrea Mazzolari
2009-08-02
Edward Sebesta
2009-08-02
Andrea Mazzolari
s1813 question
Andrea Mazzolari
2009-08-01
Hi all,

i need to spin and pattern s1813 on both sides of a silicon wafer.
For this reason i can not realize softbake and hard bake operations over
hot plate.

I will use a convection oven. Which could be the correct temperature and
time for hard bake and softbake in a convection oven ?

Best regards,
Andrea

reply
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