Dear All,

I would like to CMP a 3'' Silicon wafer using a  4'' carrier (we do not have
CMP wafer carrier for 3''  wafers).

I heard that this is possible with the use of a 4'' ''insert''.

This insert is made of a thin circular velvet cloth and has a 0.5'' wide
ring at circumference to accomodate 3'' wafer. This insert surface is wet by
water and 3'' wafer is stick to it by surface tension and whole assembly is
put in the carrier.

Does any one know more details about this insert ? Any idea who can supply
use us these inserts?

Any help would be highly appreciated.

Thanks,
Pradeep