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MEMSnet Home: MEMS-Talk: about platinum etching
about platinum etching
2009-08-08
abhaya joshi
2009-08-10
Yoshi.Sakata_Gmail
2009-08-10
Bill Moffat
2009-08-10
walter
2009-08-10
Miyakawa, Natsuki
about platinum etching
abhaya joshi
2009-08-08
hi,

i am doing platinum etching (200nm). i am using HCL (8):HNO3 (1) solution at
70C>

i am observing lot of non uniform etching behavior and lot of undercutting.
can any one suggest how to avoid this.

-abhay joshi
university of pune
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