PVD or CVD are similar.  even CVD is better because of the low stress he is
after.


--- On Tue, 8/18/09, walter  wrote:

From: walter 
Subject: Re: [mems-talk] Source for Low Stress Silicon Nitride
To: rshile@NANOINK.net, "General MEMS discussion" 
Date: Tuesday, August 18, 2009, 7:44 AM

Hi I don't know whether LPCVD will do the trick,also depending how thick a film.
You may want to consider PVD sputtering.

It worked well for us.

walter@elume.com