In that case, it seems that the etchant is causing PMMA to lose
adhesion.

Dan

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of luhaorice
Sent: Wednesday, August 19, 2009 11:56 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Gold peel off with PMMA mask

Thanks for your reply.  We didn't open windows near every fine lines.
We also have peel off problem at areas far away (hundreds of microns)
from the windows (rectangle about 1um by 10um).

Thanks,
Hao