In my experience both seem to work pretty well.  If you use Ti, do not
expose the device to HF after patterning the metal.

Dan

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Shah, Forum N
Sent: Thursday, August 20, 2009 2:34 PM
To: General MEMS discussion
Subject: [mems-talk] Lift- off Ti/Pt

Hello All,

I am sputtering a 250 Angstrom adhesion layer of  Ti and 1500 angstrom
adhesion layer of Platinum.

Can someone tell me how long does it take for the lift - off to occur if
the PR thickness is around 7 microns.

And also if someone can tell me if Chrome or titanium is a better
adhesion layer for Platinum.

Thanks in Advance,

Forum