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MEMSnet Home: MEMS-Talk: How to polish diced quartz chip?
How to polish diced quartz chip?
2009-08-21
Lin Yu
How to polish diced quartz chip?
Lin Yu
2009-08-21
All,

After dicing the quartz wafer, I found that there is always some residue
left on the edge which causes the edge higher than the center of the chip.
However, in my application, I need the chip to be very flat. I have tried to
scratch the edges and cleaned it ultrasonically. The stuff still can not be
removed. Could anyone give me any suggestion about how to get rid of
this edge effect?

Thanks,
Lin
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