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MEMSnet Home: MEMS-Talk: Lift-off 8000 A gold using PR 5214
Lift-off 8000 A gold using PR 5214
2009-08-25
Chih-Chieh Cheng
2009-08-25
Wilson, Thomas
2009-08-26
Bill Moffat
2009-08-27
Te LI
Lift-off 8000 A gold using PR 5214
Wilson, Thomas
2009-08-25
You should be able to, provided the linewidths are ~2 microns, at least using a
recipe that I submitted last week. I've lifted off 5000 A Nb (and 200 nm Al/Pd)
using it with sharp lines. I'll resend if I can find it.
________________________________________
From: [email protected] [[email protected]] On Behalf Of
Chih-Chieh Cheng [[email protected]]
Sent: Tuesday, August 25, 2009 3:51 PM
To: [email protected]
Subject: [mems-talk] Lift-off 8000 A gold using PR 5214

Hello everyone,

As title, has anyone ever tried lift-off 8000 A gold (or any other metal)
using PR 5214?  The thickness of gold is relatively thick so I am wondering
it may not work perfectly.

Thanks for your time.

CC
reply
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