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MEMSnet Home: MEMS-Talk: Lift-off 8000 A gold using PR 5214
Lift-off 8000 A gold using PR 5214
2009-08-25
Chih-Chieh Cheng
2009-08-25
Wilson, Thomas
2009-08-26
Bill Moffat
2009-08-27
Te LI
Lift-off 8000 A gold using PR 5214
Te LI
2009-08-27
Hi CC,

8000A metal is very thick and you need 2.4um photoresist for it at least. I
think you should try Su8 since it could be spinned at a thicker condition.

COOLT




在2009-08-26?03:51:56,"Chih-Chieh?Cheng"??写道:
>Hello?everyone,
>
>As?title,?has?anyone?ever?tried?lift-off?8000?A?gold?(or?any?other?metal)
>using?PR?5214???The?thickness?of?gold?is?relatively?thick?so?I?am?wondering
>it?may?not?work?perfectly.
>
>Thanks?for?your?time.
>
>CC
reply
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