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MEMSnet Home: MEMS-Talk: Dielectric constant of SU-8
Dielectric constant of SU-8
2009-08-27
Zhang, Sheng
2009-08-28
Daniel Drysdale
Dielectric constant of SU-8
Zhang, Sheng
2009-08-27
Hi, all,

I was wondering if there is any paper on dielectric constant of SU-8, or is it
documented somewhere?

I found different value from Microchem datasheet (3.2),
Thorpe's paper "High frequency transmission line using micromachined polymer
dielectric" (4).

And does the value  depend on process, like temperature?

Thanks!

Jason
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