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MEMSnet Home: MEMS-Talk: Aqua regia on glass slides
Aqua regia on glass slides
2009-08-28
Shah, Forum N
Aqua regia on glass slides
Shah, Forum N
2009-08-28
Hello All,

Please help me. I have a couple of questions:

1. I wanted to etch gold and Platinum (both on separate slides)  on glass slides
using Aqua regia.

   Is it safe to use Aqua regia with glass slides at room temperature(for gold)
and elevated temperature (for PT)?

2. What is the platinum etch rate when we use Aqua regia at 80C while etching
platinum?

Thanks,
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