Hey, all,

We have a spin coating system (P-6708D) and I am trying to use it for SU-8
coating. The chuck diameter is 1 inch and the substrate is normal coverslip.


It worked fine before, but recently, we got some problem with it. Even at
low speed (500 rpm), the coverslip will be thrown away. It seems that the
coverslip will not be held by the vacuum.

I suspect the problem is with the vacuum. First, I checked the vacuum pump,
which works fine. Then I checked the connecting tube, and there is no
leaking. When I pressed the "start" botton, the system did not give error
message. So I suppose the system is fine. Do you get similar experience? Any
other places I can check and repair to make the system work? I appreciate
your time very much.

Thanks,

Lina Wang
Driftmier Engineering Center
University of Georgia