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MEMSnet Home: MEMS-Talk: Single-side piranha cleaning
Single-side piranha cleaning
2009-09-02
Shivalik Bakshi
Single-side piranha cleaning
Shivalik Bakshi
2009-09-02
Hello,

I need to Piranha clean one side of my wafer while protecting the other side.

Is there a company that makes teflon wafer holders for single-side Piranha
cleaning?

Thanks,

Shivalik Bakshi
Cambridge MA
reply
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