Shut off the gas by turning the regulator clockwise 'cause righty is
tighty.

But seriously folks,
If the vacuum pumps works and there are no leaks in the line I'd check
for a restriction in the vacuum line.  Vacuum lines on resist spinners
often get clogged after sucking in resist, particularly in university
labs.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of lina wang
Sent: Wednesday, September 02, 2009 2:07 PM
To: [email protected]
Subject: [mems-talk] problem with P-6708D spin coating system

Hey, all,

We have a spin coating system (P-6708D) and I am trying to use it for
SU-8
coating. The chuck diameter is 1 inch and the substrate is normal
coverslip.


It worked fine before, but recently, we got some problem with it. Even
at
low speed (500 rpm), the coverslip will be thrown away. It seems that
the
coverslip will not be held by the vacuum.

I suspect the problem is with the vacuum. First, I checked the vacuum
pump,
which works fine. Then I checked the connecting tube, and there is no
leaking. When I pressed the "start" botton, the system did not give
error
message. So I suppose the system is fine. Do you get similar experience?
Any
other places I can check and repair to make the system work? I
appreciate
your time very much.

Thanks,

Lina Wang
Driftmier Engineering Center
University of Georgia