We just eliminated the second bake. Bob Henderson

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Yu Wang
Sent: Tuesday, September 08, 2009 10:51 AM
To: General MEMS discussion
Subject: Re: [mems-talk] SU8

Hi, Ken,

I'm very interested in your process. Would you please tell me how you
avoided cross-linking (from softbaking to DRIE)?

Thanks,

Yu