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MEMSnet Home: MEMS-Talk: Pt Ion Milling
Pt Ion Milling
2009-09-14
Deepasree Konduparthi
2009-09-15
Morrison, Richard H., Jr.
2009-09-15
Ruiz, Marcos Daniel (SENCOE)
2009-09-15
Ad Hall
Pt Ion Milling
Deepasree Konduparthi
2009-09-14
Hi all:

I am looking for Ion milling recipes/vendors for etching Pt with Au as a
mask. I would prefer it to have selectivity to Ti, but can manage if it has
etch selectivity to Silicon. I tried wetching pt and it is a mess and would
prefer ion milling. I would appreciate your response.

Thanks
Deepa
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