Hi,

Ion Mill does not have any selectivity, it etches at the sputter rate of
the material, everything etches, organics are slower than metals but
most metals are real close to each other for sputter rate.

Rick


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Deepasree
Konduparthi
Sent: Monday, September 14, 2009 12:36 PM
To: General MEMS discussion
Subject: [mems-talk] Pt Ion Milling

Hi all:

I am looking for Ion milling recipes/vendors for etching Pt with Au as a
mask. I would prefer it to have selectivity to Ti, but can manage if it
has
etch selectivity to Silicon. I tried wetching pt and it is a mess and
would
prefer ion milling. I would appreciate your response.

Thanks
Deepa