I thought Kopin or some other specialty wafer company made Silicon on
Insulator (SOI) wafers. A wafer that has a Si/SiO2/Si structure is fused
with a insulator wafer and the Si layer cleaves off onto the insulator
wafer which I thought was silica.

Ed

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Chong Liu
Sent: Wednesday, September 16, 2009 3:45 PM
To: General MEMS discussion
Subject: [mems-talk] Silicon on fused silica or SOS?


Hi,

Has anybody here ever used SOS (silicon on sapphire) wafers before?  And
any recommendation about where to order? I am thinking to buy wafers
where the substrate is transparent but could stand higher temperature.
The candidates are silicon on fused silica or SOS. The former seems rare
(is it?), so I choose the latter.

Thank you very much!

Chong