Hi,

I'm looking for a transparent layer that can protect my Al, polysilicon and
nitride patterns from BOE/HF dip for 200-300minutes. There are three strict
requirements:

(1) The layer can withstand BOE/HF dip for 200-300minutes

(2) The adhesion of the layer to its underlying Al, Polysilicon and nitride
patterns is strong enough so that it will not be peeled off by BOE/HF dip.

(3) The layer is easily stripped by ite remover without damaging the Al,
Polysilicon and nitride patterns.

I have tried SU8. It is good in (1), but bad in (2) and (3).

Any suggestions will be appriciated.

Thanks,

Yu Wang