Folks,

I was wondering what's the usual method to measure a capacitive sensor? I need
to measure capacitance of ~2pF to ~6pF accurately in the order of 0.1pF (or even
more accurate).  Probe stations usually introduce parasitic capacitance in the
order of 100pF...

Also, how to bond the sensor to the test fixture is another issue. Currently I
use silver epoxy and thin wire to connect the sensor to a RCA plug. That
severely compromised the repeatability since I need to make the connection
everytime by hand..

Any suggestions?

Thanks,
Jason