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MEMSnet Home: MEMS-Talk: what am i doing wrong with ti adhesion layers?
what am i doing wrong with ti adhesion layers?
1998-10-20
andrew lyon
what am i doing wrong with ti adhesion layers?
andrew lyon
1998-10-20
What am i doing wrong with Ti adhesion layers?  I am thermally
evaporating 50-100nm Au films on glass substrates with 2-5nm Ti adhesion
layers.  After a few days, the films turn from reflective Au to a frosty
white color.  Is this titanium oxidation or some other diffusion process
I am unfamiliar with?

Thanks

L. Andrew Lyon, Assistant Professor
School of Chemistry and Biochemistry
Georgia Institute of Technology
Atlanta, GA  30332

[email protected]


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