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MEMSnet Home: MEMS-Talk: pattering metal using laser
pattering metal using laser
2009-09-28
Salam Gabran
2009-09-29
Edward Sebesta
2009-09-29
Marc Reinig
pattering metal using laser
Salam Gabran
2009-09-28
Hi,

I am trying to pattern metal tracks on glass wafer using laser without
using a photolithography mask.

Is there is process for that?  Is there a photoresist that can be
patterned by green or UV3 laser beams?

kind regards

Salam R. Gabran, MASc.
Research associate, PhD. Candidate
MIAMI - CIRFE Groups
ECE Dept.
University of Waterloo
200 University Avenue West
Waterloo, Ontario
N2L-3G1
Office: CEIT-3024
Tel (cell): 519-729-8066
Tel (office): 519-888-4567 x37253
Email: salam@ieee.org
Web: www.ece.uwaterloo.ca/~sgabran
web: www.CIRFE.uwaterloo.ca
web: www.MIAMI.uwaterloo.ca
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