Bilayer resist is for making lift-off easier. It does not planarize
anything. To change the sidewall profile from square to round you
could reflow it at a higher temperature. I am not sure if that was
your question.



On Thu, Oct 1, 2009 at 1:42 PM, Andrea Lucibello  wrote:
> Hi all,
>
> Does anyone know if it is possible to planarize photoresist (change its shape
from square to round)? I know that exist a method called Bilayer photoresist
process?  How does this process work?
>
> Thanks in advance for the help.
>
> Regards
> A.L