Dear MEMS community:

We are conducting a survey of methods to detect atomic and subatomic particles
for a size constrained application. We'd like to hear from anyone in the MEMS
community who has purposely, or accidently, used micromachined structures to
sense such particles. Please, if you can, answer the following questions:

1) What particles were detected, if known?

2) What structure was used?

3) What performance was achieved (Probability of detection, sensing
field-of-view, etc.)?

Thank you for your cooperation.

Jim Brady
E-Systems ECI Division
Voice: 813-381-2000 x2773
FAX: 813-343-9605
email: [email protected]