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MEMSnet Home: MEMS-Talk: photolithography equipment
photolithography equipment
2009-10-07
Ben Pepin
2009-10-07
Andrew Sarangan
2009-10-07
Bryan Bishop
photolithography equipment
Andrew Sarangan
2009-10-07
You can get good spin coaters for about $5-10k. I've seen them on ebay for
lower. If that is not low enough, you can always build one with a simple DC
motor. The tricky part is to get a vacuum line through the motor shaft. But
if you are not going to do high rpms, you may not even need a vacuum hold.


On Wed, Oct 7, 2009 at 10:19 AM, Ben Pepin  wrote:

> Hello all,
>
> I am looking to purchase a few items for use in photolithography of a
> Si wafer. I am needing to buy a UV source and also a "low cost" spin
> coater. If anyone knows any companys or has any suggestions I would
> greatly appreciate your feedback.
>
> Thanks,
> Ben Pepin
reply
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