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MEMSnet Home: MEMS-Talk: Atomic layer deposition of metal and dielectric
Atomic layer deposition of metal and dielectric
2009-10-09
NG
Atomic layer deposition of metal and dielectric
NG
2009-10-09
Hi,

Does anyone knows of a reliable atomic layer deposition system for the
deposition of metal and/or dielectric in the same chamber? I am hoping to
get advise regarding precautions and potential difficulty in the deposition
process.

My intended application is in the field of meta-materials and structure.

Thanks.

Best regards,
TK
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