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MEMSnet Home: MEMS-Talk: Electrode on PDMS film
Electrode on PDMS film
2009-10-13
memser
Electrode on PDMS film
memser
2009-10-13
Hi,

   I need to form an aluminum electrode on PDMS film.
Is it possible (Temperature, ion bombardment) to sputter
(Varian 3180 sputtering system) an aluminum film on the polymer?

Providing literature about forming electrodes on a PDMS film would also
be appreciated.

Thank you very much!

S. Sougle
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