A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etching gold through copper micro-holes
Etching gold through copper micro-holes
2009-10-14
Dave Lewis
2009-10-14
Bill Moffat
2009-10-15
Edward Sebesta
2009-10-19
Bill Moffat
2009-10-19
Dave Lewis
2009-10-19
Dave Lewis
2009-10-20
Edward Sebesta
Etching gold through copper micro-holes
Dave Lewis
2009-10-14
Hello all,

I'm trying to etch gold through micro-hole features in a copper layer
(holes produced by a photoresist/lithography process).  I've tried aqua
regia vapor (maybe if I heat it up... but I don't want to hurt the
copper anymore than I have to) and I've tried potassium iodide, iodine,
water solution in a liquid state.

I've had success as long as the holes in the copper are large enough but
I need to access the gold in much smaller holes.  It seems like the
holes in the copper are too small for anything to gain access to the
gold.

Please assist me with this problem.

Best Regards,

Dave Lewis
Lake Shore Cryotronics
Ohio
[email protected]
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
Addison Engineering
The Branford Group