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MEMSnet Home: MEMS-Talk: Etching gold through copper micro-holes
Etching gold through copper micro-holes
2009-10-14
Dave Lewis
2009-10-14
Bill Moffat
2009-10-15
Edward Sebesta
2009-10-19
Bill Moffat
2009-10-19
Dave Lewis
2009-10-19
Dave Lewis
2009-10-20
Edward Sebesta
Etching gold through copper micro-holes
Dave Lewis
2009-10-19
All,

The holes are anywhere from 1 to 5 microns in size that I am unable to
etch through.  I have tried sodium lauryl sulfate as a surfactant in the
Iodine etching solution with no success (even when using ultrasonic
agitation).

What I need (in my opinion) is a chemical etchant that's smaller than
iodine & less toxic than cyanide.  I need to be able to get a gold
etchant through copper micro-holes (about 2 microns in size).

Thanks for all your efforts,

Dave Lewis
Lake Shore Cryotronics
Ohio
[email protected]

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