Hello,
We have been making devices using comb drives.  One problem we have
encountered is the curling of fingers which resulted in fingers making
contact with electrodes underneath.  Sometimes the fingers curl up.  The
fingers are typically 150 microns long, 3 microns wide, and has 5
microns curvature.  The obvious suspects are film stress and poor
release.  Yet the film stress is about 10 Mpa, and standard release
procedures are being followed.  Has anyone solved this problem, and
achieved consistant yield?  Any comments, suggestions, or information
will be very much appreciated.

Ying Hsu
Irvine Sensors Corp.
3001 Redhill Ave.
Costa Mesa, CA