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MEMSnet Home: MEMS-Talk: silicon etching with KOH solution 10%
silicon etching with KOH solution 10%
2009-10-28
Jing Xiao
2009-10-29
Shao Guocheng
2009-10-29
Fei Wang
2009-10-29
Nathan McCorkle
2009-10-30
Brian Stahl
silicon etching with KOH solution 10%
Jing Xiao
2009-10-28
Have you guys ever tried to etch silicon with KOH solution (10%)?

I just found 20% and higher concentration are often used .

I want to know if 10% will have a faster etching rate than 20% and if so, how
much.

Thanks.

reply
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