How does KOH compare to BOE in surface quality? Is one more or less isotropic?

On Thu, Oct 29, 2009 at 4:24 AM, Fei Wang  wrote:
> Hi Xiao,
>
> It can be found from the following reference:
>
> "Anisotropic etching of crystalline silicon in alkaline solutions", J.
> Electrochem. Soc., Vol.137, No.11, p3612, Nov.1990.
>
> 10%KOH  13.3um/hour (50degreeC)    25.2(60)  46(70)  82(80)
>
> Hope it helps.
>
> Best regards,
> Yours sincerely
> Fei Wang

--
Nathan McCorkle
Rochester Institute of Technology
College of Science, Biotechnology/Bioinformatics