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MEMSnet Home: MEMS-Talk: vertical taper Photoresist profile
vertical taper Photoresist profile
2009-10-30
QiuWeibin
2009-10-31
Edward Sebesta
2009-10-31
Bill Moffat
2009-11-02
Sudesh Bhagwat
vertical taper Photoresist profile
QiuWeibin
2009-10-30
 Dear All,

    We are trying to get the vertical taper PR profile with 8mm size and 0-1.5um
thickness. Can anyone give us some suggestion?  We want to avoid a grey scale
mask, since they are so costly.

Thanks a lot

Qiu
reply
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