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MEMSnet Home: MEMS-Talk: Dicing Polyimide Layer
Dicing Polyimide Layer
2009-11-03
jianqiang gu
2009-11-03
Dave Lewis
2009-11-03
DongJuan Xi
2009-11-03
jianqiang gu
Dicing Polyimide Layer
jianqiang gu
2009-11-03
Hi Lewis,

Thanks for your suggestion. The silicon wafer is only the mounting material and
will be etched off after the dicing. So mainly the saw won't touch deeply with
silicon in the process.

Thanks a lot.
JQ Gu

reply
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