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MEMSnet Home: MEMS-Talk: Spectroscopic Reflectometer
Spectroscopic Reflectometer
2009-11-03
Brian Stahl
2009-11-03
Dave Lewis
2009-11-03
Albert Henning
Spectroscopic Reflectometer
Albert Henning
2009-11-03
I have extensive experience with the CD-1700 from n&k technology.  I am
not familiar with the other tools you mention, and so can't comment on
the relative merits (which approaches the sort of commercialism which is
verboten on this discussion group).  I am familiar with spectroscopic
and conventional ellipsometry; reflectometry seems to me to be a much
more powerful and robust tool, as well as having much faster throughput.

---
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
[email protected]

-----Original Message-----
From: Brian Stahl [mailto:[email protected]]
Sent: Monday, November 02, 2009 5:01 PM
To: General MEMS discussion
Subject: [mems-talk] Spectroscopic Reflectometer

Hello Everyone,

I'm in the market for a spectroscopic reflectometer tool for measuring
thin
film stacks, and one of the vendors I've been talking to is Angstrom Sun
Technologies.  I'm also looking at Filmetrics, however the system I need
is
considerably less expensive from Angstrom Sun Technologies.  Have any of
you
ever worked with them or their systems, and if so would you be willing
to
give me your opinion of them (service, reliability, meeting
expectations,
etc.)?

Thanks,

Brian C. Stahl
reply
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