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MEMSnet Home: MEMS-Talk: Branson/IPC S4055 Plasma Etcher
Branson/IPC S4055 Plasma Etcher
1998-10-22
Bestul, Mark
Branson/IPC S4055 Plasma Etcher
Bestul, Mark
1998-10-22
Does anyone know if the Branson/IPC S4055 Plasma System configuration
produces an isotropic or anisotropic etch condition.  Thank you for the
help.

Regards,


reply
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